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A:
The output contains many lines like this:
WriteOutput @ “Blah blah blah”
WriteOutput @ “Blah blah blah”
If this line is supposed to be:
WriteOutput “[Blah blah blah]”
Then you need to add quotation marks to the string constant:
WriteOutput “[Blah blah blah]”
This is actually the source of your problem — you are missing the quotation marks that are required to specify a string constant.
As the demand for a finer semiconductor device increases, it is desirable to achieve a higher resolution and a higher precision in pattern formation. At the same time, it is also desirable to improve productivity. The development of a lithography technology, which enables the achievement of both of these improvements, is under way. The use of EUV as an exposure light has been examined.
The use of EUV as a short wavelength exposure light can enable resolution to be improved. It is expected that a pattern of 32 nm or less can be formed by EUV lithography. In order to perform EUV exposure, however, an EUV light source having a short wavelength is needed. At present, as an EUV light source, a laser plasma light source is being developed and is expected to be used in the near future. In a laser plasma light source, a laser beam is used to illuminate a target material to generate plasma light. The plasma light is spectrally narrowed by a spectroscope, to thereby generate EUV light.
In a laser plasma light source, the energy distribution of the plasma light is wavelength dependent. Accordingly, the spectrum of light emitted from a laser plasma light source is broad, and, in order to acquire a target wavelength of EUV
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